Interlayer dielectrics for semiconductor technologies /

Semiconductor technologies are moving at such a fast pace that new materials are needed in all types of application. Manipulating the materials and their properties at atomic dimensions has become a must. This book presents the case of interlayer dielectrics materials whilst considering these challe...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Otros Autores: Murarka, S. P., Eizenberg, M. (Moshe), Sinha, A. K. (Ashok K.)
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Amsterdam ; Boston : Elsevier/Academic Press, 2003.
Temas:
Semiconductor wafers.
Dielectrics.
Plaquettes �a gravure en semi-conducteurs.
Di�electriques.
TECHNOLOGY & ENGINEERING > Electronics > Solid State.
TECHNOLOGY & ENGINEERING > Electronics > Semiconductors.
Acceso en línea:Texto completo
Tabla de Contenidos:
  • Dialectric Properties, Characterization of Low Dielectric Constant Materials, Compatibilities of Dielectric Film, Silicon Based Dielectrics, Low K Polymers, Chemical Vapour Deposition of CF Low K Materials, Nanoporous Dielectric Films: Fundamental Property Relations and Microelectronic Applications, High K Dielectrics Grown by Atomic Layer Disposition, Dielectric Materials in Optical Waveguide Applications, Reliability, Future Trends in Silicon Technologies.

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