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Interlayer dielectrics for semiconductor technologies /

Semiconductor technologies are moving at such a fast pace that new materials are needed in all types of application. Manipulating the materials and their properties at atomic dimensions has become a must. This book presents the case of interlayer dielectrics materials whilst considering these challe...

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Detalles Bibliográficos
Clasificación:	Libro Electrónico
Otros Autores:	Murarka, S. P., Eizenberg, M. (Moshe), Sinha, A. K. (Ashok K.)
Formato:	Electrónico eBook
Idioma:	Inglés
Publicado:	Amsterdam ; Boston : Elsevier/Academic Press, 2003.
Temas:	Semiconductor wafers. Dielectrics. Plaquettes �a gravure en semi-conducteurs. Di�electriques. TECHNOLOGY & ENGINEERING > Electronics > Solid State. TECHNOLOGY & ENGINEERING > Electronics > Semiconductors.
Acceso en línea:	Texto completo

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