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Ionized physical vapor deposition /
This volume provides the first comprehensive look at a pivotal new technology in integrated circuit fabrication. For some time researchers have sought alternate processes for interconnecting the millions of transistors on each chip because conventional physical vapor deposition can no longer meet th...
| Clasificación: | Libro Electrónico |
|---|---|
| Otros Autores: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
San Diego :
Academic Press,
�2000.
|
| Colección: | Thin films (San Diego, Calif.) ;
v. 27. |
| Temas: | |
| Acceso en línea: | Texto completo Texto completo |