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The materials science of thin films /
This is the first available textbook to provide comprehensive coverage of the science and technology of thin films and coatings. Developed for upper-level undergraduate and beginning graduate students, the book discusses physical and chemical vapor deposition processes; phenomena involving nucleatio...
| Clasificación: | Libro Electrónico |
|---|---|
| Autor principal: | |
| Autor Corporativo: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Boston :
Academic Press,
�1992.
|
| Temas: | |
| Acceso en línea: | Texto completo |
MARC
| LEADER | 00000cam a2200000 a 4500 | ||
|---|---|---|---|
| 001 | SCIDIR_ocm65196181 | ||
| 003 | OCoLC | ||
| 005 | 20231117032851.0 | ||
| 006 | m o d | ||
| 007 | cr un||||||||| | ||
| 008 | 060324s1992 maua ob 001 0 eng d | ||
| 040 | |a EEICP |b eng |e pn |c EEICP |d OPELS |d OCLCQ |d OCLCF |d DEBBG |d ZCU |d OCLCQ |d LUN |d OCLCQ |d OCLCO |d OCLCE |d OCLCQ |d OCLCO | ||
| 019 | |a 57243034 |a 507310962 |a 1287887445 | ||
| 020 | |a 9780125249904 | ||
| 020 | |a 012524990X | ||
| 020 | |a 9780080511184 |q (electronic bk.) | ||
| 020 | |a 008051118X |q (electronic bk.) | ||
| 035 | |a (OCoLC)65196181 |z (OCoLC)57243034 |z (OCoLC)507310962 |z (OCoLC)1287887445 | ||
| 042 | |a dlr | ||
| 050 | 4 | |a TA418.9.T45 |b O47 1991eb | |
| 082 | 0 | 4 | |a 620/.44 |2 22 |
| 084 | |a 33.68 |2 bcl | ||
| 100 | 1 | |a Ohring, Milton, |d 1936- | |
| 245 | 1 | 4 | |a The materials science of thin films / |c Milton Ohring. |
| 260 | |a Boston : |b Academic Press, |c �1992. | ||
| 300 | |a 1 online resource (xx, 704 pages) : |b illustrations | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a online resource |b cr |2 rdacarrier | ||
| 504 | |a Includes bibliographical references and index. | ||
| 520 | |a This is the first available textbook to provide comprehensive coverage of the science and technology of thin films and coatings. Developed for upper-level undergraduate and beginning graduate students, the book discusses physical and chemical vapor deposition processes; phenomena involving nucleation and growth, stress, diffusion and reaction; structural and chemical characterization techniques; and applications involving coatings, magnetic and optical recording materials, integrated optics, and quantum devices. The book includes chapters on epitaxy and surface modification in addition to discussing emerging technologies such as diamond films and high Tc superconductors. Complete problem sets are provided at the end of each chapter to facilitate self-study. Key Features * The first true textbook to provide broad coverage of thin films from processing to performance * Covers film materials used in microelectronics, magnetic applications, optics, and metallurgical and protective coatings * Includes chapters on epitaxy, surface modification using laser and ion beams, and emerging thin film materials and applications * Extensive treatment is given to chemical vapor deposition, diffusion and reactions, and stress in films * Provides complete exercise sets to facilitate study. | ||
| 588 | 0 | |a Print version record. | |
| 505 | 0 | |a Thin films -- a historical perspective -- A review of materials science -- Vacuum science and technology -- Physical vapor deposition -- Chemical vapor deposition -- Film formation and structure -- Characterization of thin films -- Epitaxy -- Interdiffusion and reactions in thin films -- Mechanical properties of thin films -- Electrical and magnetic properties of thin films -- Optical properties of thin films -- Metallurgical and protective coatings -- Modification of surfaces and films -- Emerging thin-film materials and applications. | |
| 506 | |3 Use copy |f Restrictions unspecified |2 star |5 MiAaHDL | ||
| 533 | |a Electronic reproduction. |b [Place of publication not identified]: |c HathiTrust Digital Library. |d 2021. |5 MiAaHDL | ||
| 538 | |a Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. |u http://purl.oclc.org/DLF/benchrepro0212 |5 MiAaHDL | ||
| 583 | 1 | |a digitized |c 2021. |h HathiTrust Digital Library |l committed to preserve |2 pda |5 MiAaHDL | |
| 650 | 0 | |a Thin films. | |
| 650 | 6 | |a Couches minces. |0 (CaQQLa)201-0035883 | |
| 650 | 7 | |a Thin films |2 fast |0 (OCoLC)fst01150018 | |
| 650 | 7 | |a Solidos E Fluidos Quanticos. |2 larpcal | |
| 650 | 7 | |a Thin films |x Mechanical properties. |2 nli | |
| 650 | 7 | |a Thin films |x Optical properties. |2 nli | |
| 650 | 7 | |a Couches minces. |2 ram | |
| 650 | 7 | |a Science des mat�eriaux. |2 ram | |
| 653 | 0 | |a Thin films | |
| 710 | 2 | |a Elsevier Science Publishers. | |
| 776 | 0 | 8 | |i Print version: |a Ohring, Milton, 1936- |t Materials science of thin films. |d Boston : Academic Press, �1992 |z 012524990X |w (DLC) 91009664 |
| 856 | 4 | 0 | |u https://sciencedirect.uam.elogim.com/science/book/9780080511184 |z Texto completo |