Thin film materials technology : sputtering of compound materials /

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An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key techn...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor principal: Wasa, Kiyotaka
Otros Autores: Kitabatake, Makoto, Adachi, Hideaki
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Norwich, NY : Heidelberg : William Andrew Pub. ; Springer, �2004.
Temas:
Cathode sputtering (Plating process)
Thin films.
Pulv�erisation cathodique > Applications industrielles.
Couches minces.
TECHNOLOGY & ENGINEERING > Electronics > Solid State.
TECHNOLOGY & ENGINEERING > Electronics > Semiconductors.
Acceso en línea:Texto completo
Tabla de Contenidos:
  • Thin Film Materials and Devices
  • Thin Film Process
  • Sputtering Phenomena
  • Sputtering Systems
  • Deposition of Compound Thin Films
  • Structural Control of Compound Thin Films
  • Microfabrication by Sputtering
  • Appendices
  • Index.

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