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Thin film materials technology : sputtering of compound materials /
An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key techn...
| Clasificación: | Libro Electrónico |
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| Autor principal: | |
| Otros Autores: | , |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Norwich, NY : Heidelberg :
William Andrew Pub. ; Springer,
�2004.
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| Temas: | |
| Acceso en línea: | Texto completo |
| Sumario: | An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key technology for nano-materials in high-speed information applications and large-area functional coating such as automotive or decorative painting of plastic parts, among other topics. In seven concise chapters, the book thoroughly reviews basic thin film technology and deposition processes, sputtering processes, structural control of compound thin films, and microfabrication by sputtering. |
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| Descripción Física: | 1 online resource (xiv, 518 pages) : illustrations |
| Bibliografía: | Includes bibliographical references and index. |
| ISBN: | 0815514832 9780815514831 9783540211181 3540211187 9780815519317 0815519311 1282027662 9781282027664 9786612027666 6612027665 0080946984 9780080946986 |