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Semiconductor safety handbook : safety and health in the semiconductor industry /

The purpose of the Semiconductor Safety Handbook is to provide a current, single source reference for many of the primary semiconductor EH & S technologies and disciplines. To this end, the contributors have assembled a comprehensive text written by some of the leading experts in EH & S in t...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Otros Autores: Bolmen, Richard A.
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Westwood, N.J. : Noyes Publications, �1998.
Colección:Semiconductor safety series.
Temas:
Acceso en línea:Texto completo

MARC

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490 1 |a Semiconductor safety series 
504 |a Includes bibliographical references and index. 
520 2 |a The purpose of the Semiconductor Safety Handbook is to provide a current, single source reference for many of the primary semiconductor EH & S technologies and disciplines. To this end, the contributors have assembled a comprehensive text written by some of the leading experts in EH & S in the semiconductor industry. 
588 0 |a Print version record. 
505 0 0 |t Injury and Illness of Semiconductor Workers: Experience and Epidemiologic Studies --  |t Environmental Compliance in the Semiconductor Industry: Detection, Correction and Prevention --  |t Chemical Hazards in Semiconductor Operations --  |t Industrial Hygiene --  |t Electrical Hazards --  |t Radiation Safety --  |t Recognition, Evaluation and Control of Some Plasma Processing Hazards --  |t Fire Protection Technology for Semiconductor Operations --  |t Building and Fire Codes Impacting the Semiconductor Industry --  |t Gases and Gas Equipment --  |t Toxic Gas Monitoring --  |t References --  |t Index. 
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