Semiconductor industrial hygiene handbook : monitoring, ventilation, equipment, and ergonomics /
This book provides a review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. Chapters include industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal...
Clasificación: | Libro Electrónico |
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Autor principal: | |
Otros Autores: | , |
Formato: | Electrónico eBook |
Idioma: | Inglés |
Publicado: |
Park Ridge, N.J., U.S.A. :
Noyes Publications,
�1995.
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Colección: | Materials science and process technology series.
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Temas: | |
Acceso en línea: | Texto completo |
Tabla de Contenidos:
- Introduction
- Industrial Hygiene Monitoring
- Industrial Hygiene Monitoring: Physical Agents
- Ventilation
- Personal Protective Equipment (PPE)
- Indoor Air Quality (IAQ)
- Ergonomics
- Industrial Hygiene Recordkeeping
- Plan Review
- Appendix A: Silicon Ingot and Wafer Manufacturing
- Appendix B: Silicon Device Manufacturing Introduction
- Appendix C: III-V (GaAs)
- Appendix D: III-V Device: Microwave IC
- Appendix E: Ion Implanter Maintenance Safety Considerations
- Appendix F: Bibliography
- Glossary and Acronyms
- Index.