Handbook of VLSI microlithography : principles, technology, and applications /
This handbook gives readers a look at the technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings - including optical lithography, electron beam, ion beam, and X-ray lithography. The book's main theme is the specia...
Clasificación: | Libro Electrónico |
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Otros Autores: | |
Formato: | Electrónico eBook |
Idioma: | Inglés |
Publicado: |
Park Ridge, N.J. : Norwich, N.Y. :
Noyes Publications ; William Andrew Pub.,
�2001.
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Edición: | 2nd ed. |
Colección: | Materials science and process technology series. Electronic materials and process technology.
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Temas: | |
Acceso en línea: | Texto completo |
Tabla de Contenidos:
- Issues and Trends Affecting Lithography Tool Selection Strategy
- Resist Technology: Design, Processing and Applications
- Lithography Process Monitoring and Defect Detection
- Techniques and Tools for Photo Metrology
- Techniques and Tools for Optical Lithography
- Microlithography Tool Automation
- Electron Beam ULSI Applications
- Rational Vibration and Structural Dynamics for Lithographic Tool Installations
- Applications of Ion Microbeam Lithography and Direct Processing
- X-Ray Lithography.