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Wafer manufacturing : shaping of single crystal silicon wafers /

"A wafer (often from silicon crystals) is a thin slice of semiconducting material, upon which microcircuits are constructed by doping, etching, and deposition of various materials. Generally, they are cut from a semiconductor using a diamond saw, then polished on one or both faces. Wafer slicin...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autores principales: Kao, Imin I. (Autor), Chung, Chunhui (Autor)
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Hoboken, NJ : John Wiley & Sons Ltd, 2021.
Edición:First edition.
Temas:
Acceso en línea:Texto completo (Requiere registro previo con correo institucional)

MARC

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082 0 0 |a 621.3815/2  |2 23 
049 |a UAMI 
100 1 |a Kao, Imin I.,  |e author. 
245 1 0 |a Wafer manufacturing :  |b shaping of single crystal silicon wafers /  |c Imin Kao, Chunhui Chung. 
250 |a First edition. 
264 1 |a Hoboken, NJ :  |b John Wiley & Sons Ltd,  |c 2021. 
264 4 |c Ã2021 
300 |a 1 online resource (xiv, 290 pages) :  |b illustrations (some color) 
336 |a text  |b txt  |2 rdacontent 
337 |a computer  |b n  |2 rdamedia 
338 |a online resource  |b nc  |2 rdacarrier 
504 |a Includes bibliographical references and index. 
520 |a "A wafer (often from silicon crystals) is a thin slice of semiconducting material, upon which microcircuits are constructed by doping, etching, and deposition of various materials. Generally, they are cut from a semiconductor using a diamond saw, then polished on one or both faces. Wafer slicing is the first post crystal-growth step toward producing a polished wafer for electronic device fabrication in the semiconductor and photovoltaic (PV) industry. Advanced slicing technologies such as wiresawing are nowadays widely used in wafer production because of its ability to cut single crystalline and polycrystalline crystals with large diameter and produce wafers from thick (a few mm) to very thin sizes (300 microns)."--  |c Provided by publisher. 
588 |a Description based on online resource; title from digital title page (viewed on April 21, 2021). 
590 |a O'Reilly  |b O'Reilly Online Learning: Academic/Public Library Edition 
650 0 |a Semiconductor wafers  |x Design and construction. 
650 7 |a Semiconductor wafers  |x Design and construction  |2 fast 
700 1 |a Chung, Chunhui,  |e author. 
776 0 8 |i Print version:  |a Kao, Imin I..  |t Wafer manufacturing  |b First edition.  |d Hoboken, NJ : Wiley, 2021.  |z 9780470061213  |w (DLC) 2020034639 
856 4 0 |u https://learning.oreilly.com/library/view/~/9780470061213/?ar  |z Texto completo (Requiere registro previo con correo institucional) 
994 |a 92  |b IZTAP