Materials processing by cluster ion beams : history, technology, and applications /

Materials Processing by Cluster Ion Beams: History, Technology, and Applications discusses the contemporary physics, materials science, surface engineering issues, and nanotechnology capabilities of cluster beam processing. Written by the originator of the gas cluster ion beam (GCIB) concept, this b...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor principal: Yamada, I. (Isao) (Autor)
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Boca Raton, FL : CRC Press, [2016]
Temas:
Ion bombardment.
Complex ions.
Materials > Effect of radiation on.
Nanostructured materials.
Bombardement ionique.
Ions complexes.
Matériaux > Effets du rayonnement sur.
Nanomatériaux.
TECHNOLOGY & ENGINEERING > Engineering (General)
TECHNOLOGY & ENGINEERING > Reference.
Acceso en línea:Texto completo (Requiere registro previo con correo institucional)
Tabla de Contenidos:
  • Ion beam technology : overview and history
  • History and milestones of cluster beam development
  • Development of cluster beam sources for solid materials
  • Gas cluster ion beam equipment
  • Cluster ion-solid surface interaction kinetics
  • Cluster ion beam sputtering
  • Cluster ion implantation
  • Cluster ion beam-assisted deposition
  • Applications
  • Conclusions.

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