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Materials processing by cluster ion beams : history, technology, and applications /
Materials Processing by Cluster Ion Beams: History, Technology, and Applications discusses the contemporary physics, materials science, surface engineering issues, and nanotechnology capabilities of cluster beam processing. Written by the originator of the gas cluster ion beam (GCIB) concept, this b...
| Clasificación: | Libro Electrónico |
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| Autor principal: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Boca Raton, FL :
CRC Press,
[2016]
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| Temas: | |
| Acceso en línea: | Texto completo (Requiere registro previo con correo institucional) |
| Sumario: | Materials Processing by Cluster Ion Beams: History, Technology, and Applications discusses the contemporary physics, materials science, surface engineering issues, and nanotechnology capabilities of cluster beam processing. Written by the originator of the gas cluster ion beam (GCIB) concept, this book: offers an overview of ion beam technologies, from the discovery of monomer ions to the introduction of GCIBs; explores the development of sources for producing cluster beams from solid materials; describes the engineering characteristics of gas cluster ion beam equipment; covers cluster ion-solid surface interaction kinetics as well as sputtering, implantation, and ion-assisted deposition; details surface processing techniques for smoothing, shallow implantation, and preparation of high-quality thin films; introduces representative examples of emerging GCIB industrial applications. |
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| Descripción Física: | 1 online resource (xv, 244 pages) |
| Bibliografía: | Includes bibliographical references and index. |
| ISBN: | 9781498711760 1498711766 1498711758 9781498711753 9781498733878 1498733875 |