Cargando…
Compact plasma and focused ion beams /
This book discusses a method to produce a compact microwave plasma by overcoming challenges posed both by (i) geometrical cutoff of the waveguide and (ii) density cutoff of the plasma. It then presents the properties of such compact plasmas. Finally, it brings out a new area of applications where su...
| Clasificación: | Libro Electrónico |
|---|---|
| Autor principal: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Boca Raton :
Taylor & Francis,
[2014]
|
| Temas: | |
| Acceso en línea: | Texto completo (Requiere registro previo con correo institucional) |
| Sumario: | This book discusses a method to produce a compact microwave plasma by overcoming challenges posed both by (i) geometrical cutoff of the waveguide and (ii) density cutoff of the plasma. It then presents the properties of such compact plasmas. Finally, it brings out a new area of applications where such compact high densities plasmas are utilized for multi-element focused ion beams. |
|---|---|
| Descripción Física: | 1 online resource : text file, PDF |
| Bibliografía: | Includes bibliographical references and index. |
| ISBN: | 9781466557925 1466557923 9781466557888 1466557885 1306180147 9781306180146 |