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Nano-lithography /

Lithography is an extremely complex tool - based on the concept of "imprinting" an original template version onto mass output - originally using relatively simple optical exposure, masking, and etching techniques, and now extended to include exposure to X-rays, high energy UV light, and el...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Otros Autores: Landis, Stefan
Formato: Electrónico eBook
Idioma:Inglés
Francés
Publicado: London : Hoboken, N.J. : ISTE ; Wiley, 2011.
Temas:
Acceso en línea:Texto completo (Requiere registro previo con correo institucional)
Tabla de Contenidos:
  • Ch. 1. X-ray lithography : fundamentals and applications
  • ch. 2. NanoImprint lithography
  • ch. 3. Lithography techniques using scanning probe microscopy
  • ch. 4. Lithography and manipulation based on the optical properties of metal nanostructures
  • ch. 5. Patterning with self-assembling block copolymers
  • ch. 6. Metrology for lithography.