Ferroelectric dielectrics integrated on silicon /
This book describes up-to-date technology applied to high-K materials for More Than Moore applications, i.e. microsystems applied to microelectronics core technologies. After detailing the basic thermodynamic theory applied to high-K dielectrics thin films including extrinsic effects, this book emph...
Clasificación: | Libro Electrónico |
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Otros Autores: | Defaÿ, Emmanuel |
Formato: | Electrónico eBook |
Idioma: | Inglés |
Publicado: |
London : Hoboken, NJ :
ISTE ; Wiley,
2011.
|
Temas: | |
Acceso en línea: | Texto completo (Requiere registro previo con correo institucional) |
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