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Transmission electron microscopy in micro-nanoelectronics /
Today, the availability of bright and highly coherent electron sources and sensitive detectors has radically changed the type and quality of the information which can be obtained by transmission electron microscopy (TEM). TEMs are now present in large numbers not only in academia, but also in indust...
| Clasificación: | Libro Electrónico |
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| Otros Autores: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
London : Hoboken :
ISTE, Ltd. ; Wiley,
©2013.
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| Colección: | ISTE.
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| Temas: | |
| Acceso en línea: | Texto completo (Requiere registro previo con correo institucional) |
| Sumario: | Today, the availability of bright and highly coherent electron sources and sensitive detectors has radically changed the type and quality of the information which can be obtained by transmission electron microscopy (TEM). TEMs are now present in large numbers not only in academia, but also in industrial research centers and fabs. This book presents in a simple and practical way the new quantitative techniques based on TEM which have recently been invented or developed to address most of the main challenging issues scientists and process engineers have to face. |
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| Descripción Física: | 1 online resource (259 pages) |
| Bibliografía: | Includes bibliographical references and index. |
| ISBN: | 9781118579022 111857902X 9781118579039 1118579038 9781118579053 1118579054 1848213670 9781848213678 |