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|a Nano-CMOS gate dielectric engineering /
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|a 1 online resource (xiv, 234 pages) :
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|a Includes bibliographical references and index.
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|a 1. Overview of CMOS technology -- 2. High-k dielectrics -- 3. Complex forms of high-k oxides -- 4. Dielectric interfaces -- 5. Impacts on device operation -- 6. Fabrication issues -- 7. Conclusions.
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|a Nano-CMOS Gate Dielectric Engineering.
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|a Metal oxide semiconductors, Complementary
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|i Print version:
|a Wong, Hei.
|t Nano-CMOS gate dielectric engineering.
|d Boca Raton, FL : CRC Press, ©2012
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