Semiconductor manufacturing handbook /

Annotation WORLD-CLASS SEMICONDUCTOR MANUFACTURING EXPERTISE AT YOUR FINGERTIPS This is a comprehensive reference to the semiconductor manufacturing process and ancillary facilities -- from raw material preparation to packaging and testing, applying basics to emerging technologies. Readers charged w...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor Corporativo: IDC Corporation
Otros Autores: Geng, Hwaiyu, Zhou, Lin, Park, Ilsun, Ravi, K. V., Rathore, Hazara S., Chanda, Kaushik, Ren, L. P., Tu, King N., Coumou, David J., Biltoft, Peter, Howard, Charles, Mack, Chris A., Graf, Michael, Zhang, Peng, Lai, Shouliang, Solzbacher, Florian, McInerney, Edward J., Ramdani, Jamal, Vaccari, Giovanni, Ritzdorf, Tom, Klocke, John, Dyer, Timothy S., Machamer, Andrew, Blair, Donald W., Arai, Kazuhisa, Kobayashi, Yoshikazu, Otani, Hideaki, Tonnies, Dietrich, Topper, Michael, Wang, Zhong L., Huff, Michael A., Liu, David N., Curcie, Wayne D., Sweeney, Joseph D., Cox, James C., Cavicchi, Kristin, Barsness, Dan, Gould, Charles K., Albrecht, David J., Li, Bo, Carriker, Wayne, Haris, Clint, Peltinov, Ram, Menaker, Mina, Scibilia, Bruno, Altis, Yoan Dupret, McCafferty, Robert H., Davis, Brett J., Trammell, Steven R., Pavlotsky, Richard V., Beck, Stephen C., Gendreau, Michael, Amick, Hal, Levit, Larry, Muller, Chris, Kochevar, Steven, Gromala, Jerry, Pinkowski, Richard E.
Formato: Electrónico eBook
Idioma:Inglés
Publicado: New York, N.Y. : McGraw-Hill Education, [2005]
Edición:First edition.
Colección:McGraw-Hill's AccessEngineering.
Temas:
Semiconductors > Design and construction.
Integrated circuits > Design and construction.
Semiconductors > Materials.
Integrated circuits > Reliability.
Dielectrics.
Silicides.
Plasma engineering.
Process control.
Vacuum techology.
Integrated circuits > Masks.
Microlithography.
Ion implantation.
Rapid thermal process.
Plasma etching.
Etching.
Physical vapor deposition.
Chemical vapor deposition.
Epitaxy.
Electrolytic polishing.
Semiconductors > Polishing.
Semiconductors > Cleaning.
Grinding and polishing.
Microelectronic packaging.
Electronic packaging.
Nanotechnology.
Microfabrication.
Microelectromechanical systems.
Flat panel displays.
Gases.
Waste gases > Purification.
Hydraulic conveying.
Slurry pipelines.
Chemical plants > Waste disposal.
Water-supply engineering.
Materials handling.
Metrology.
Six sigma (Quality control standard)
Semiconductor industry > Environmental aspects.
Semiconductor industry > Health aspects.
Semiconductor industry > Safety measures.
Clean rooms > Design and construction.
Vibration.
Noise control.
Static eliminators.
Electrostatics.
Airborne infection.
Air > Pollution.
Sewage > Purification > Neutralization.
Electronic books.
Acceso en línea:Texto completo
Descripción
Sumario:Annotation WORLD-CLASS SEMICONDUCTOR MANUFACTURING EXPERTISE AT YOUR FINGERTIPS This is a comprehensive reference to the semiconductor manufacturing process and ancillary facilities -- from raw material preparation to packaging and testing, applying basics to emerging technologies. Readers charged with optimizing the design and performance of manufacturing processes will find all the information necessary to produce the highest quality chips at the lowest price in the shortest time possible. The "Semiconductor Manufacturing Handbook provides leading-edge information on semiconductor wafer processes, MEMS, nanotechnology, and FPD, plus the latest manufacturing and automation technologies, including: Yield Management Automated Material Handling System Fab and Cleanroom Design and Operation Gas Abatement and Waste Treatment Management And much more Written by 60 international experts, and peer reviewed by a seasoned advisory board, this handbook covers the fundamentals of relevant technology and its real-life application and operational considerations for planning, implementing, and controlling manufacturing processes. It includes hundreds of detailed illustrations and a list of relevant books, technical papers, and websites for further research. This inclusive, wide-ranging coverage makes the "Semiconductor Manufacturing Handbook the most comprehensive single-volume reference ever published in the field. STATE-OF-THE-ART SEMICONDUCTOR TECHNOLOGIES AND MANUFACTURING PROCESSES: SEMICONDUCTOR FUNDAMENTALS How Chips Are Designed and Made * Substrates * Copper and Low-k Dielectrics * Silicide Formation * Plasma * Vacuum * Photomask WAFER PROCESSING TECHNOLOGIES Microlithography * IonImplantation * Etch * PVD/ALD * CVD * ECD * Epitaxy * CMP * Wet Cleaning FINAL MANUFACTURING Packaging * Grinding, Stress Relief, Dicing * Inspection, Measurement, and Testing NANOTECHNOLOGY, MEMS, AND FPD GAS AND C. Annotation This handbook will provide engineers with the principles, applications, and solutions needed to design and manage semiconductor manufacturing operations. Consolidating the many complex fields of semiconductor fundamentals and manufacturing into one volume by deploying a team of world class specialists, it allows the quick look up of specific manufacturing reference data across many subdisciplines.
Notas:Print version c2005.
Descripción Física:1 online resource (912 pages) : illustrations.
Also available in print edition.
Bibliografía:Includes bibliographical references and index.
ISBN:0071468153
0071445595 (print-ISBN)
9780071445597

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