Fundamentals of Microelectromechanical Systems (MEMS) /

This textbook is intended for undergraduate seniors and graduate students in electrical, mechanical, and biomedical engineering as well as professional engineers who want to learn MEMS technology. This textbook is aimed to teach design, fabrication and testing of MEMS and contains many questions and...

Descripción completa

Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor principal: Kim, Eun Sok (Autor)
Formato: Electrónico eBook
Idioma:Inglés
Publicado: New York, N.Y. : McGraw-Hill Education, [2021].
Edición:First edition.
Temas:
Microelectromechanical systems.
Microelectronics > Materials.
Electronic books.
Acceso en línea:Texto completo
Tabla de Contenidos:
  • Cover
  • Title Page
  • Copyright Page
  • Dedication
  • Contents
  • Preface
  • Introduction
  • 1 Basic Microfabrication
  • 1.1 Introduction
  • 1.2 Photolithography
  • 1.3 Thermal Oxidation of Silicon
  • 1.4 Silicon Doping
  • 1.5 Vacuum Basics
  • 1.6 Thin-Film Depositions
  • 1.7 Mass Flow Sensing and Control
  • 1.8 Electroplating of Metals
  • 1.9 Soft Lithography and Its Derivative Technology
  • 1.10 Wafer Bonding
  • 1.11 Flip-Chip Bonding for Electrical Interconnect
  • 1.12 Engineered Silicon Substrates
  • References
  • Questions and Problems
  • 2 Micromachining
  • 2.1 Bulk Micromachining
  • 2.2 Surface Micromachining
  • 2.3 Dry Micromachining
  • 3 Transduction Principles
  • 3.1 Electrostatic and Capacitive Transduction
  • 3.2 Electromagnetic Transduction
  • 3.3 Piezoelectric Transduction
  • 3.4 Thermal Transduction
  • References
  • Questions and Problems
  • 4 RF MEMS
  • 4.1 Electromagnetic Wave Spectrum
  • 4.2 Silicon Micromechanical Resonator
  • 4.3 Acoustic Wave Resonators and Filters
  • 4.4 Surface Acoustic Wave Filters
  • 4.5 Tunable Capacitors
  • 4.6 RF MEMS Switches
  • References
  • Questions
  • 5 Optical MEMS
  • 5.1 Micromirror Array for Projection Display
  • 5.2 Micromirrors for Optical Fiber Communication
  • References
  • Questions
  • 6 Mechanics and Inertial Sensors
  • 6.1 Statics
  • 6.2 Dynamics
  • 6.3 MEMS Accelerometers
  • 6.4 Vibratory Gyroscopes
  • References
  • Questions and Problems
  • 7 Thin-Film Properties, SAW/BAW Sensors, Pressure Sensors, and Microphones
  • 7.1 Thin-Film Residual Stress
  • 7.2 Piezoelectric Films
  • 7.3 Material Properties Expressed as Tensor
  • References
  • Questions and Problems
  • 8 Microfluidic Systems and Bio- MEMS
  • 8.1 Microchannels and Droplet Formation
  • 8.2 Microvalves
  • 8.3 Micropumps
  • 8.4 Micromixers
  • 8.5 Lab-on-Chip
  • References
  • Questions
  • 9 Power MEMS
  • 9.1 Electromagnetic Vibration Energy Harvesting
  • 9.2 Piezoelectric Vibration Energy Harvesting
  • 9.3 Power Generation from Vibration Associated with Human?s Walk
  • References
  • Questions and Problems
  • 10 Electronic Noises, Interface Circuits, and Oscillators
  • 10.1 Input Referred Noise
  • 10.2 Voltage Amplifier versus Charge Amplifier for Piezoelectric Sensors
  • 10.3 Electromagnetic Interference
  • 10.4 Poles and Zeros
  • 10.5 Design and Analysis of Oscillators Based on Bulk Acoustic-Wave Resonators
  • References
  • Questions and Problems
  • Index.

Ejemplares similares