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Fundamentals of Microelectromechanical Systems (MEMS) /
This textbook is intended for undergraduate seniors and graduate students in electrical, mechanical, and biomedical engineering as well as professional engineers who want to learn MEMS technology. This textbook is aimed to teach design, fabrication and testing of MEMS and contains many questions and...
| Clasificación: | Libro Electrónico |
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| Autor principal: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
New York, N.Y. :
McGraw-Hill Education,
[2021].
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| Edición: | First edition. |
| Temas: | |
| Acceso en línea: | Texto completo |
| Sumario: | This textbook is intended for undergraduate seniors and graduate students in electrical, mechanical, and biomedical engineering as well as professional engineers who want to learn MEMS technology. This textbook is aimed to teach design, fabrication and testing of MEMS and contains many questions and problems for the students? homework and exams for the sake of in-depth understanding of MEMS as well as problem-solving and/or design skills in MEMS analysis and design. |
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| Descripción Física: | 1 online resource (415 pages) : illustrations. Also available in print edition. |
| Bibliografía: | Includes bibliographical references and index. |
| ISBN: | 9781264257591 (e-ISBN) 1264257597 (e-ISBN) 9781264257584 (print-ISBN) 1264257589 (print-ISBN) |