MEMS resonator filters /

This book explores the challenges and opportunities of developing circuits with MEMS resonator filters. The replacement of classical electrical components with electromechanical components is explored in this book, and the specific properties of MEMS resonators required in various frequency ranges a...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Otros Autores: Patrikar, Rajendra M. (Editor )
Formato: Electrónico eBook
Idioma:Inglés
Publicado: London, United Kingdom : The Institution of Engineering and Technology, 2020.
Colección:Materials, circuits and devices series ; 65.
Temas:
Microelectromechanical systems.
Filters and filtration.
Micro-Electrical-Mechanical Systems
Microsystèmes électromécaniques.
Filters and filtration
Microelectromechanical systems
bulk acoustic wave devices.
finite element analysis.
integrated circuit design.
integrated circuit manufacture.
integrated circuit modelling.
integrated circuit packaging.
integrated circuit reliability.
integrated circuit testing.
microfabrication.
micromechanical resonators.
radiofrequency filters.
radiofrequency integrated circuits.
radiofrequency oscillators.
surface acoustic wave resonator filters.
surface acoustic wave resonators.
three-dimensional integrated circuits.
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