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The chemical history of lithography /
"This volume is the first in a series of three books that make up the second edition of Chemistry and Lithography, which is continued in volume 2 (Chemistry in Lithography) and volume 3 (The Practice of Lithography). Each volume is a unit in itself and can stand alone, which is fortunate in vie...
| Clasificación: | Libro Electrónico |
|---|---|
| Autor principal: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Bellingham, Washington (1000 20th St. Bellingham WA 98225-6705 USA) :
SPIE,
2020.
|
| Edición: | Second edition. |
| Colección: | SPIE Press monograph ;
PM313. |
| Temas: | |
| Acceso en línea: | Texto completo |
Tabla de Contenidos:
- General preface to the second edition
- Acronyms and abbreviations
- 1. Introduction to lithography
- 2. Invention of lithography and photolithography: 2.1. Introduction; 2.2. Invention of lithography; 2.3. Invention of photolithography; 2.4. Pioneers of photolithography
- 3. Physical origins of lithography: 3.1. Introduction; 3.2. Key developments in optical physics that enabled the invention and development of lithography; 3.3. Key developments in optical instruments and glassmaking technologies that enabled the development of lithography; 3.4. Key developments in atomic and molecular physics that enabled the invention and development of lithography
- 4. Chemical origins of lithography: 4.1. Introduction; 4.2. Key developments in chemistry that enabled the invention and development of lithography; 4.3. Laws and theories of chemical reactions; 4.4. Rational synthesis of chemical substances; 4.5. The structure of chemical compounds and phenomena deriving from them
- 5. Evolution of lithography: 5.1. Introduction; 5.2. Offset lithography; 5.3. The printed circuit board and the development of the electronics industry; 5.4. The transistor and microelectronics revolution; 5.5. Semiconductor lithography; 5.6. Advanced lithographic patterning techniques and imaging mechanisms; 5.7. Outlook on the evolution of lithography
- Index.