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Principles of lithography /
"This text is intended to serve as an introduction to the science of microlithography, but also covers several subjects in depth, making it useful to the experienced lithographer as well. Topics directly related to manufacturing tools are addressed, including overlay, the stages of exposure, to...
| Clasificación: | Libro Electrónico |
|---|---|
| Autor principal: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Bellingham, Washington, USA :
SPIE Press,
[2019]
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| Edición: | Fourth edition. |
| Temas: | |
| Acceso en línea: | Texto completo |
Tabla de Contenidos:
- Overview of lithography
- Optical pattern formation
- Photoresists
- Modeling and thin-film effects
- Wafer steppers and scanners
- Overlay
- Masks and reticles
- Confronting the diffraction limit
- Metrology
- Immersion lithography and the limits of optical lithography
- Lithography costs
- Extreme ultraviolet lithography
- Alternative lithography techniques.