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Handbook of thin film deposition /

Handbook of thin film deposition, Fourth edition, is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, materials f...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Otros Autores: Seshan, Krishna (Editor ), Schepis, Dominic (Editor )
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Oxford, United Kingdom ; Cambridge, MA, United States : William Andrew, an imprint of Elsevier, [2018]
Edición:Fourth edition.
Temas:
Acceso en línea:Texto completo
Descripción
Sumario:Handbook of thin film deposition, Fourth edition, is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, materials for memory applications and methods for thin film optical processes. The book is broken up into three sections: scaling, equipment and processing, and applications. In this newly revised edition, the handbook will also explore the limits of thin film applications, most notably as they relate to applications in manufacturing, materials, design and reliability. Offers a practical survey of thin film technologies aimed at engineers and managers involved in all stages of the process: design, fabrication, quality assurance, applications and the limitations faced by those processes. Covers core processes and applications in the semiconductor industry and new developments within the photovoltaic and optical thin film industries.
Descripción Física:1 online resource
Bibliografía:Includes bibliographical references and index.
ISBN:9780128123126
0128123125