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EUV lithography /
Extreme ultraviolet lithography (EUVL) is the principal lithography technology aiming to manufacture computer chips beyond the current 193-nm-based optical lithography, and recent progress has been made on several fronts: EUV light sources, optics, optics metrology, contamination control, masks and...
| Clasificación: | Libro Electrónico |
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| Otros Autores: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Bellingham, Washington, USA :
SPIE Press,
[2018]
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| Edición: | Second edition. |
| Colección: | SPIE Press monograph ;
PM283. |
| Temas: | |
| Acceso en línea: | Texto completo |