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|a Optical MEMS for chemical analysis and biomedicine /
|c edited by Hongrui Jiang.
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|a London, United Kingdom :
|b The Institution of Engineering and Technology,
|c 2016.
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|a 1 online resource (xv, 448 pages) :
|b illustrations.
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|a text
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|a Materials, circuits and devices series ;
|v 25
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|a Print version record.
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|a Includes bibliographical references and index.
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|a Preface; 1. Introduction; 2. Fabrication and manufacturing technology for optical MEMS; 3. Electrothermally actuated MEMS scanning micromirrors and their applications in endoscopic optical coherence tomography imaging; 4. Electrowetting-based microoptics; 5. Microcameras; 6. Biologically inspired optical surfaces for miniaturized optical systems; 7. Tuning nanophotonic cavities with nanoelectromechanical systems; 8. Quantum dot nanophotonics: micropatterned excitation, microarray imaging, and hyperspectral microscopy; 9. Photothermal microfluidics.
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|a 10. Optical manipulation for biomedical applications11. Polymer-based optofluidic lenses; 12. Nanostructured aluminum oxide-based optical biosensing and imaging; Index.
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|a Optical MEMS are micro-electromechanical systems merged with micro-optics. They allow sensing or manipulating optical signals on a very small size scale using integrated mechanical, optical, and electrical systems and hold great promise specifically in biomedical applications, among others. This book describes the current state of optical MEMS in chemical and biomedical analysis with topics covered including fabrication and manufacturing technology for optical MEMS; electrothermally-actuated MEMS scanning micromirrors and their applications in endoscopic optical coherence tomography imaging; electrowetting-based microoptics; microcameras; biologically inspired optical surfaces for miniaturized optical systems; tuning nanophotonic cavities with nanoelectromechanical systems; quantum dot nanophotonics - micropatterned excitation, microarray imaging and hyperspectral microscopy; photothermal microfluidics; optical manipulation for biomedical applications; polymer-based optofluidic lenses; and nanostructured aluminum oxide-based optical biosensing and imaging. Bringing together topics representing the most exciting progress made and current trends in the field in recent years, this book is an essential addition to the bookshelves of researchers and advanced students working on developing, manufacturing or applying optical MEMS and other sensors.
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|a Optical MEMS.
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|a Microsystèmes optomécaniques.
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|a chemical analysis.
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|a endoscopes.
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|a micromechanical devices.
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|a micromirrors.
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|a nanophotonics.
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|a optical fabrication.
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|a optical microscopy.
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|a Jiang, Hongrui,
|e editor.
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776 |
0 |
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|i Print version:
|t Optical MEMS for chemical analysis and biomedicine.
|d London : Institution of Engineering and Technology, 2016
|z 1849198977
|w (OCoLC)928782144
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|a Materials, circuits and devices series ;
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