Cargando…

Developments in surface contamination and cleaning. Volume 7, Cleanliness validation and verification /

As device sizes in the semiconductor industries are shrinking, they become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not as effective at smaller scales. The book series Developments in Surface Contamination and Cleaning a...

Descripción completa

Detalles Bibliográficos
Clasificación:Libro Electrónico
Otros Autores: Kohli, Rajiv, 1947- (Editor ), Mittal, K. L., 1945- (Editor )
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Amsterdam : Elsevier, 2015.
Edición:First edition.
Temas:
Acceso en línea:Texto completo

Ejemplares similares