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A guide to hands-on MEMS design and prototyping /
"Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fa...
| Clasificación: | Libro Electrónico |
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| Autor principal: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Cambridge, UK ; New York :
Cambridge University Press,
2011.
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| Temas: | |
| Acceso en línea: | Texto completo |
| Sumario: | "Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well and exercises and design challenges at the end of every chapter. Additional resources are provided online, including solutions to the design challenge problems and a selection of case studies of MEMS devices"-- |
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| Descripción Física: | 1 online resource (xi, 166 pages, 16 unnumbered pages of plates) : illustrations (some color) |
| Bibliografía: | Includes bibliographical references and index. |
| ISBN: | 9781139109895 1139109898 9781139127080 113912708X 9780511984662 0511984669 9781139114257 1139114255 9781139116428 1139116428 9781139122160 1139122169 1283295601 9781283295604 9786613295606 6613295604 1139112066 9781139112062 1139124110 9781139124119 1107219361 9781107219366 |