Fabrication engineering at the micro and nanoscale /

Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor principal: Campbell, Stephen A., 1954-
Formato: Electrónico eBook
Idioma:Inglés
Publicado: New York : Oxford University Press, 2008.
Edición:3rd ed.
Colección:Oxford series in electrical and computer engineering.
Temas:
Semiconductors > Design and construction.
Semiconductors > Mathematical models.
Microelectronics.
Nanoelectronics.
Miniaturization
Semi-conducteurs > Conception et construction.
Semi-conducteurs > Modèles mathématiques.
Microélectronique.
Nanoélectronique.
microelectronics.
Nanoelectronics
Microelectronics
Semiconductors > Design and construction
Semiconductors > Mathematical models
Acceso en línea:Texto completo
Tabla de Contenidos:
  • An introduction to microelectronic fabrication
  • Semiconductor substrates
  • Diffusion
  • Thermal Oxidation
  • Ion Implantation
  • Rapid thermal processing
  • Optical lithography
  • Photoresists
  • Nonoptical lithographic techniques
  • Vacuum Science and plasmas
  • Etching
  • Physical deposition: evaporation and sputtering
  • Chemical vapor deposition
  • Epitaxial growth
  • Device isolation, contacts, and metalization
  • CMOS technologies
  • Other transistor technologies
  • Optoelectronic technologies
  • MEMS
  • Integrated circuit manufacturing.

Ejemplares similares