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110728s2008 nyua ob 001 0 eng d |
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|a KNOVL
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|d OCLCQ
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|b Knovel Corporation
|n http://www.knovel.com
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|b .C25 2008eb
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0 |
4 |
|a 621.3815/2
|2 22
|
| 049 |
|
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|a UAMI
|
| 100 |
1 |
|
|a Campbell, Stephen A.,
|d 1954-
|
| 245 |
1 |
0 |
|a Fabrication engineering at the micro and nanoscale /
|c Stephen A. Campbell.
|
| 250 |
|
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|a 3rd ed.
|
| 260 |
|
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|a New York :
|b Oxford University Press,
|c 2008.
|
| 300 |
|
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|a 1 online resource (xiv, 647 pages) :
|b illustrations
|
| 336 |
|
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|a text
|b txt
|2 rdacontent
|
| 337 |
|
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|a computer
|b c
|2 rdamedia
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| 338 |
|
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|a online resource
|b cr
|2 rdacarrier
|
| 490 |
1 |
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|a The Oxford series in electrical and computer engineering
|
| 504 |
|
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|a Includes bibliographical references and index.
|
| 505 |
0 |
|
|a An introduction to microelectronic fabrication -- Semiconductor substrates -- Diffusion -- Thermal Oxidation -- Ion Implantation -- Rapid thermal processing -- Optical lithography -- Photoresists -- Nonoptical lithographic techniques -- Vacuum Science and plasmas -- Etching -- Physical deposition: evaporation and sputtering -- Chemical vapor deposition -- Epitaxial growth -- Device isolation, contacts, and metalization -- CMOS technologies -- Other transistor technologies -- Optoelectronic technologies -- MEMS -- Integrated circuit manufacturing.
|
| 588 |
0 |
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|a Print version record.
|
| 546 |
|
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|a English.
|
| 590 |
|
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|a Knovel
|b ACADEMIC - Electronics & Semiconductors
|
| 650 |
|
0 |
|a Semiconductors
|x Design and construction.
|
| 650 |
|
0 |
|a Semiconductors
|x Mathematical models.
|
| 650 |
|
0 |
|a Microelectronics.
|
| 650 |
|
0 |
|a Nanoelectronics.
|
| 650 |
|
2 |
|a Miniaturization
|
| 650 |
|
6 |
|a Semi-conducteurs
|x Conception et construction.
|
| 650 |
|
6 |
|a Semi-conducteurs
|x Modèles mathématiques.
|
| 650 |
|
6 |
|a Microélectronique.
|
| 650 |
|
6 |
|a Nanoélectronique.
|
| 650 |
|
7 |
|a microelectronics.
|2 aat
|
| 650 |
|
7 |
|a Nanoelectronics
|2 fast
|
| 650 |
|
7 |
|a Microelectronics
|2 fast
|
| 650 |
|
7 |
|a Semiconductors
|x Design and construction
|2 fast
|
| 650 |
|
7 |
|a Semiconductors
|x Mathematical models
|2 fast
|
| 700 |
1 |
|
|a Campbell, Stephen A.,
|d 1954-
|t Science and engineering of microelectronic fabrication.
|
| 776 |
0 |
8 |
|i Print version:
|a Campbell, Stephen A., 1954-
|t Fabrication engineering at the micro and nanoscale.
|b 3rd ed.
|d New York : Oxford University Press, 2008
|z 0195320174
|w (DLC) 2007013450
|w (OCoLC)122338108
|
| 830 |
|
0 |
|a Oxford series in electrical and computer engineering.
|
| 856 |
4 |
0 |
|u https://appknovel.uam.elogim.com/kn/resources/kpFEMNE001/toc
|z Texto completo
|
| 994 |
|
|
|a 92
|b IZTAP
|
