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Physics of radio-frequency plasmas /

"Low-temperature radio-frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on phy...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor principal: Chabert, Pascal, 1969-
Otros Autores: Braithwaite, Nicholas (Nicholas St. J.)
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Cambridge ; New York : Cambridge University Press, 2011.
Temas:
Acceso en línea:Texto completo

MARC

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100 1 |a Chabert, Pascal,  |d 1969- 
245 1 0 |a Physics of radio-frequency plasmas /  |c Pascal Chabert, Nicholas Braithwaite. 
260 |a Cambridge ;  |a New York :  |b Cambridge University Press,  |c 2011. 
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520 |a "Low-temperature radio-frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on physics, this book will interest graduate students and researchers in applied physics and electrical engineering. The book incorporates a cutting-edge perspective on RF plasmas. It also covers basic plasma physics, including transport in bounded plasmas and electrical diagnostics. Its pedagogic style engages readers, helping them to develop physical arguments and mathematical analyses. Worked examples apply the theories covered to realistic scenarios, and over 100 in-text questions let readers put their newly acquired knowledge to use and gain confidence in applying physics to real laboratory situations"--  |c Provided by publisher 
504 |a Includes bibliographical references (pages 375-382) and index. 
588 0 |a Print version record. 
505 0 |a 1. Introduction; 2. Plasma dynamics and equilibrium; 3. Bounded plasmas; 4. Radiofrequency sheaths; 5. Single frequency capacitively-coupled plasmas; 6. Multi-frequency capacitively-coupled plasmas; 7. Inductively-coupled plasmas; 8. Helicon plasmas; 9. Real plasmas; 10. Electrical measurements. 
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650 0 |a Radio frequency. 
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650 6 |a Radiofréquences. 
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650 7 |a Radio frequency.  |2 fast  |0 (OCoLC)fst01087309 
700 1 |a Braithwaite, Nicholas  |q (Nicholas St. J.) 
776 0 8 |i Print version:  |a Chabert, Pascal, 1969-  |t Physics of Radio-Frequency Plasmas.  |d Cambridge ; New York : Cambridge University Press, 2011, ©2011  |z 9780521763004  |w (DLC) 2010042728  |w (OCoLC)651917375 
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