Lithography process control /

This text covers lithography process control at several levels, from fundamental through advanced topics. The book is a self-contained tutorial that works both as an introduction to the technology and as a reference for the experienced lithographer. It reviews the foundations of statistical process...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor principal: Levinson, Harry J.
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Bellingham, Wash. : SPIE Optical Engineering Press, ©1999.
Colección:Tutorial texts in optical engineering ; v. TT 28.
Temas:
Semiconductors > Etching.
Microlithography > Quality control.
Semi-conducteurs > Attaque chimique.
Microlithographie > Qualité > Contrôle.
TECHNOLOGY & ENGINEERING > Mechanical.
Lithografie > Halbleitertechnologie
Statistische Prozesslenkung
Microlithographie.
Commande de processus.
Semiconducteurs > Qualité > Contrôle.
Lithographie (Halbleitertechnologie).
Acceso en línea:Texto completo
Descripción
Sumario:This text covers lithography process control at several levels, from fundamental through advanced topics. The book is a self-contained tutorial that works both as an introduction to the technology and as a reference for the experienced lithographer. It reviews the foundations of statistical process control as background for advanced topics such as complex processes and feedback. In addition, it presents control methodologies that may be applied to process development pilot lines.
Descripción Física:1 online resource (x, 190 pages) : illustrations
Bibliografía:Includes bibliographical references (pages 169-188) and index.
ISBN:9781615837366
1615837361
9780819478559
0819478555

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