Optical scattering : measurement and analysis /

As the authoritative resource on optical scattering, this book was developed from many years of teaching light-scatter measurement and analysis courses to optical engineers. Dr. Stover covers scattering beginning with its basics and covering surface roughness calculations, measurements, instrumentat...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor principal: Stover, John C.
Autor Corporativo: Society of Photo-optical Instrumentation Engineers
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Bellingham, Wash., USA : SPIE Optical Engineering Press, ©1995.
Edición:2nd ed.
Colección:SPIE monograph ; PM24.
Temas:
Light > Scattering.
Lumière > Diffusion.
Acceso en línea:Texto completo
Tabla de Contenidos:
  • Chapter 1. Introduction to light scatter: 1.1 The scattering of light
  • 1.2 Scatter from a smooth sinusoidal surface
  • 1.3 Scatter from other surfaces
  • 1.4 Scatter from windows and particulates
  • 1.5 Bidirectional scatter distribution functions
  • 1.6 Total integrated scatter
  • 1.7 Summary.
  • Chapter 2. Surface roughness: 2.1 Profile characterization
  • 2.2 The surface power spectral-- Density and autocovariance functions
  • 2.3 Summary.
  • Chapter 3. Scatter calculations and diffraction theory: 3.1. Overview
  • 3.2. Kirchhoff diffraction theory
  • 3.3. The Rayleigh approach
  • 3.4. Comparison of vector and scalar results
  • 3.5. Summary.
  • Chapter 4. Calculation of smooth-surface statistics from the BRDF: 4.1. Practical application of the Rayleigh-Rice perturbation theory
  • 4.2. Roughness statistics of isotropic surfaces
  • 4.3. Roughness statistics of one-dimensional surfaces
  • 4.4. Roughness statistics for the general case
  • 4.5. The K-correlation surface power spectrum models
  • 4.6. The TIS derivation from the Rayleigh-Rice perturbation theory
  • 4.7. Summary.
  • Chapter 5. Polarization of scattered light: 5.1. A review of polarization concepts
  • 5.2. The polarization factor Q
  • 5.3. Scattering vectors and matrices
  • 5.4. Summary.
  • Chapter 6. Scatter measurements and instrumentation: 6.1. Scatterometer components
  • 6.2. Instrument signature
  • 6.3. Aperture effects on the measured BSDF
  • 6.4. Signature reduction and near-specular measurements
  • 6.5. The noise-equivalent BSDF
  • 6.6. Measurement of P. and instrument calibration
  • 6.7. Measurement of curved optics
  • 6.8. Coordinate systems and out-of-plane measurements
  • 6.9. Raster scans
  • 6.10. Measurement of retroreflection
  • 6.11. Alternate TIS devices
  • 6.12. Error analysis of the measured BSDF
  • 6.13. Summary.
  • Chapter 7. Scatter predictions: 7.1. Optical surfaces: using the Rayleigh-Rice equation
  • 7.2. Rough surfaces
  • 7.3. Partial data sets
  • 7.4. Scatter from diffuse samples
  • 7.5. BRDF standard surfaces
  • 7.6. Software for prediction of scatter in optical systems
  • 7.7. Summary.
  • Chapter 8. Detection of Discrete Surface and Subsurface Defects: 8.1. Polarization effects associated with defect scatter
  • 8.2. Bulk defects in transparent optics
  • 8.3. Near-point-scatter sources and differential-scattering cross section
  • 8.4. Nontopographic defects in opaque materials
  • 8.5. Summary.
  • Chapter 9. Industrial applications: 9.1 Semiconductor applications
  • 9.2. Computer disks
  • 9.3. Contamination measurement by wavelength discrimination
  • 9.4. General manufacturing examples
  • 9.5. Summary.
  • Chapter 10. Scatter specifications: 10.1 Generic specifications
  • 10.2. Calculation of specifications for several examples
  • 10.3. Summary
  • Appendix A. Review of electromagnetic wave propagation
  • A. 1 The wave equation
  • A.2 Electromagnetic plane waves in free space
  • A.3 Plane waves in a dielectric
  • A.4 Plane waves.in a conducting medium
  • Appendix B. Kirchhoff diffraction from sinusoidal gratings
  • Appendix C. BSDF data
  • Bibliography
  • Index.

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