Optical scattering : measurement and analysis /
As the authoritative resource on optical scattering, this book was developed from many years of teaching light-scatter measurement and analysis courses to optical engineers. Dr. Stover covers scattering beginning with its basics and covering surface roughness calculations, measurements, instrumentat...
Clasificación: | Libro Electrónico |
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Autor principal: | |
Autor Corporativo: | |
Formato: | Electrónico eBook |
Idioma: | Inglés |
Publicado: |
Bellingham, Wash., USA :
SPIE Optical Engineering Press,
©1995.
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Edición: | 2nd ed. |
Colección: | SPIE monograph ;
PM24. |
Temas: | |
Acceso en línea: | Texto completo |
Sumario: | As the authoritative resource on optical scattering, this book was developed from many years of teaching light-scatter measurement and analysis courses to optical engineers. Dr. Stover covers scattering beginning with its basics and covering surface roughness calculations, measurements, instrumentation, predictions, specifications, and industrial applications. Also included are appendices that review the basics of wave propagation and Kirchhoff diffraction. Whether you're an optical engineer currently investigating roughness-induced haze in the semiconductor industry, or just entering the field of scatter metrology, this text will be invaluable. |
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Descripción Física: | 1 online resource (xiii, 321 pages) : illustrations |
Bibliografía: | Includes bibliographical references (pages 303-317) and index. |
ISBN: | 9781615837397 1615837396 9780819419347 0819419346 9780819478443 081947844X |