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Resolution enhancement techniques in optical lithography /
Ever-smaller IC devices are pushing the optical lithography envelope, increasing the importance of resolution enhancement techniques. This tutorial encompasses two decades of research. It discusses theoretical and practical aspects of commonly used techniques, including optical imaging and resolutio...
| Clasificación: | Libro Electrónico |
|---|---|
| Autor principal: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Bellingham, Wash. :
SPIE Press,
©2001.
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| Colección: | Tutorial texts in optical engineering ;
v. TT 47. |
| Temas: | |
| Acceso en línea: | Texto completo |