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|a MEMS packaging /
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|v no. 3
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|a Includes bibliographical references and index.
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|a Electronic reproduction.
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|c HathiTrust Digital Library,
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|a Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002.
|u http://purl.oclc.org/DLF/benchrepro0212
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|a Editor; Authors; Abbreviations; Introductory statements; Introduction; 1. Fundamentals of MEMS packaging; 2. Joining and bonding technologies; 3. Sealing technologies; 4. Packing of microsystems; 5. Automated microassembly; 6. Testing and design for test; 7. MEMS packaging in the life sciences; 8. RF and optical packaging in telecommunications and other applications; 9. Aerospace applications; Appendix 1: Glossary; Appendix 2: Other resources; Subject Index
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|a MEMS Packaging discusses the prevalent practices and enabling techniques in assembly, packaging and testing of microelectromechanical systems (MEMS). The entire spectrum of assembly, packaging and testing of MEMS and microsystems, from essential enabling technologies to applications in key industries of life sciences, telecommunications and aerospace engineering is covered. Other topics included are bonding and sealing of microcomponents, process flow of MEMS and microsystems packaging, automated microassembly, and testing and design for testing. The Institution of Engineering and Technology is.
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|a English.
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|a Knovel
|b ACADEMIC - Nanotechnology
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|b ACADEMIC - Electronics & Semiconductors
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|a Microelectromechanical systems.
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|a Microelectronic packaging.
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|a Micro-Electrical-Mechanical Systems
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|a Microsystèmes électromécaniques.
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|a Mise sous boîtier (Microélectronique)
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|a Microelectromechanical systems
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|a Microelectronic packaging
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|a Hsu, Tai-Ran.
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|a INSPEC (Information service)
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|i Print version:
|t MEMS packaging.
|d London : INSPEC, ©2004
|z 0863413358
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|a EMIS processing series ;
|v no. 3.
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