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Developments in surface contamination and cleaning : particle deposition, control and removal /

Detalles Bibliográficos
Clasificación:	Libro Electrónico
Otros Autores:	Kohli, Rajiv, 1947-, Mittal, K. L., 1945-
Formato:	Electrónico eBook
Idioma:	Inglés
Publicado:	Amsterdam ; Boston : Elsevier/William Andrew, ©2010.
Temas:	Surfaces (Technology) Surface contamination > Prevention. Particles > Measurement. Cleaning. Coatings. Dust control. Surfaces (Technologie) Contamination de surface > Prévention. Particules (Matière) > Mesure. Nettoyage. Revêtements. Poussière > Lutte contre. cleaning. coating (material) Cleaning Coatings Dust control Particles > Measurement
Acceso en línea:	Texto completo

Tabla de Contenidos:

Particle Deposition onto Enclosure Surfaces; Contamination Control: A Systems Approach; Particles in Semiconductor Processing; Continuous Contamination Monitoring Systems; Strippable Coatings for Removal of Surface Contaminants; Ultrasonic Cleaning.
[V. 1.] Fundamentals and applied aspects
v. 2. Particle deposition, control and removal.