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EUV sources for lithography /

This comprehensive volume, edited by a senior technical staff member at SEMATECH, is the authoritative reference book on EUV source technology. The volume contains 38 chapters contributed by leading researchers and suppliers in the EUV source field. Topics range from a state-of-the-art overview and...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor Corporativo: Society of Photo-Optical Instrumentation Engineers
Otros Autores: Bakshi, Vivek
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Bellingham, Wash. : SPIE, ©2006.
Colección:SPIE monograph ; PM149.
Temas:
Acceso en línea:Texto completo

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