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Nanolithography and patterning techniques in microelectronics /

Currently surface patterning is achieved by means of optical lithographic techniques but with industry moving towards the fabrication of devices with size features of 100 nm less, the technological community is looking for alternative approaches to materials fabrication at the nanoscale. By using na...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Otros Autores: Bucknall, David G.
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Cambridge : Boca Raton, FL : Woodhead Pub. ; CRC Press, ©2005.
Colección:Woodhead Publishing in materials.
Temas:
Acceso en línea:Texto completo
Descripción
Sumario:Currently surface patterning is achieved by means of optical lithographic techniques but with industry moving towards the fabrication of devices with size features of 100 nm less, the technological community is looking for alternative approaches to materials fabrication at the nanoscale. By using nanolithography scientists can drive patterning currents through surfaces while building a 3D structure from a series of patterned layers. Electron induced chemical lithography can create ultra-high resolution templates for the site selective immobilisation of molecules, to form functional, hierarchic.
Descripción Física:1 online resource (xiv, 409 pages) : illustrations.
Bibliografía:Includes bibliographical references and index.
ISBN:9781615831869
161583186X
9781855739314
1855739313
1845690907
9781845690908
128056833X
9781280568336
9786610568338
6610568332
Acceso:Online access available only to subscribers.