Handbook of ellipsometry /

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The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated c...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Otros Autores: Tompkins, Harland G., Irene, Eugene A.
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Norwich, NY : Heidelberg, Germany : William Andrew Pub. ; Springer, ©2005.
Temas:
Ellipsometry.
Ellipsométrie.
SCIENCE > Nanoscience.
Acceso en línea:Texto completo
Tabla de Contenidos:
  • PART 1: THEORY OF ELLIPSOMETRY
  • Polarized Light and Ellipsometry
  • Optical Physics of Materials
  • Data Analysis for Spectroscopic Ellipsometry
  • PART 2: INSTRUMENTATION
  • Optical Components and the Simple PCSA (polarizer, compensator, sample, analyzer) Ellipsometer
  • Rotating Polarizer and Analyzer Ellipsometry
  • Polarization Modulation Ellipsometry
  • Multichannel Ellipsometry
  • PART 3: APPLICATIONS
  • SiO2 Films
  • Theory and Application of Generalized Ellipsometry
  • PART 4: EMERGING AREAS
  • VUV Ellipsometry
  • Spectroscopic Infrared Ellipsometry
  • Ellipsometry in Life Sciences
  • Index.

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