Micro mechanical transducers : pressure sensors, accelerometers, and gyroscopes /

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Some years ago, silicon-based mechanical sensors, like pressure sensors, accelerometers and gyroscopes, started their successful advance. Every year, hundreds of millions of these devices are sold, mainly for medical and automotive applications. The airbag sensor on which research already started se...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor principal: Bao, Min-Hang
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Amsterdam ; New York : Elsevier, 2000.
Colección:Handbook of sensors and actuators ; v. 8.
Temas:
Transducers > Handbooks, manuals, etc.
Microelectromechanical systems > Handbooks, manuals, etc.
Transducteurs > Guides, manuels, etc.
Microsystèmes électromécaniques > Guides, manuels, etc.
TECHNOLOGY & ENGINEERING > Sensors.
Microelectromechanical systems.
Transducers.
manuals (instructional materials)
handbooks.
Handbooks and manuals.
Guides et manuels.
Acceso en línea:Texto completo
Tabla de Contenidos:
  • Preface. Chapter 1
  • Introduction to micro mechanical transducers. Chapter 2
  • Basic mechanics of beam and diaphragm structures. Chapter 3
  • Air damping. Chapter 4
  • Electrostatic driving and capacitive sensing. Chapter 5
  • Piezoresistive sensing. Chapter 6
  • Piezoresistive pressure transducers. Chapter 7
  • Piezoresistive accelerometers. Chapter 8
  • Capacitive pressure transducers and accelerometers. Chapter 9
  • Resonant sensors and vibratory gyroscopes. Subject Index.

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