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Semiconductor industrial hygiene handbook : monitoring, ventilation, equipment, and ergonomics /
This book provides a review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. Chapters include industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal...
| Clasificación: | Libro Electrónico |
|---|---|
| Autor principal: | |
| Otros Autores: | , |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Park Ridge, N.J., U.S.A. :
Noyes Publications,
©1995.
|
| Colección: | Materials science and process technology series.
|
| Temas: | |
| Acceso en línea: | Texto completo |
MARC
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| 037 | |a 153931:154091 |b Elsevier Science & Technology |n http://www.sciencedirect.com | ||
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| 050 | 4 | |a TK7836 |b .W54 1995eb | |
| 082 | 0 | 4 | |a 621.3815/20289 |2 22 |
| 049 | |a UAMI | ||
| 100 | 1 | |a Williams, Michael E., |d 1949- | |
| 245 | 1 | 0 | |a Semiconductor industrial hygiene handbook : |b monitoring, ventilation, equipment, and ergonomics / |c by Michael E. Williams and David G. Baldwin ; contributing author, Paul C. Manz. |
| 260 | |a Park Ridge, N.J., U.S.A. : |b Noyes Publications, |c ©1995. | ||
| 300 | |a 1 online resource (xv, 348 pages) : |b illustrations | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a online resource |b cr |2 rdacarrier | ||
| 490 | 1 | |a Materials science and process technology series | |
| 520 | |a This book provides a review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. Chapters include industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal protective equipment, plan review, and records retention. While much of the information in these chapters can be applied to all industries, the focus and orientation is specific to issues in the semiconductor industry. | ||
| 504 | |a Includes bibliographical references and index. | ||
| 588 | 0 | |a Print version record. | |
| 505 | 0 | |a Introduction -- Industrial Hygiene Monitoring -- Industrial Hygiene Monitoring: Physical Agents -- Ventilation -- Personal Protective Equipment (PPE) -- Indoor Air Quality (IAQ) -- Ergonomics -- Industrial Hygiene Recordkeeping -- Plan Review -- Appendix A: Silicon Ingot and Wafer Manufacturing -- Appendix B: Silicon Device Manufacturing Introduction -- Appendix C: III-V (GaAs) -- Appendix D: III-V Device: Microwave IC -- Appendix E: Ion Implanter Maintenance Safety Considerations -- Appendix F: Bibliography -- Glossary and Acronyms -- Index. | |
| 506 | |3 Use copy |f Restrictions unspecified |2 star |5 MiAaHDL | ||
| 533 | |a Electronic reproduction. |b [Place of publication not identified] : |c HathiTrust Digital Library, |d 2010. |5 MiAaHDL | ||
| 538 | |a Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. |u http://purl.oclc.org/DLF/benchrepro0212 |5 MiAaHDL | ||
| 583 | 1 | |a digitized |c 2010 |h HathiTrust Digital Library |l committed to preserve |2 pda |5 MiAaHDL | |
| 590 | |a Knovel |b ACADEMIC - Electronics & Semiconductors | ||
| 590 | |a Knovel |b ACADEMIC - Safety & Industrial Hygiene | ||
| 650 | 0 | |a Semiconductor industry |x Employees |x Health and hygiene. | |
| 650 | 0 | |a Industrial hygiene. | |
| 650 | 6 | |a Semi-conducteurs |x Industrie |x Personnel |x Santé et hygiène. | |
| 650 | 7 | |a Industrial hygiene. |2 fast |0 (OCoLC)fst00971122 | |
| 650 | 7 | |a Semiconductor industry |x Employees |x Health and hygiene. |2 fast |0 (OCoLC)fst01112142 | |
| 655 | 2 | |a Handbook | |
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| 655 | 7 | |a Guides et manuels. |2 rvmgf | |
| 700 | 1 | |a Baldwin, David G. | |
| 700 | 1 | |a Manz, Paul C. | |
| 776 | 0 | 8 | |i Print version: |a Williams, Michael E. |t Semiconductor industrial hygiene handbook. |d Park Ridge, N.J., U.S.A. : Noyes Publications, ©1995 |z 0815513690 |w (DLC) 94031248 |w (OCoLC)31044757 |
| 830 | 0 | |a Materials science and process technology series. | |
| 856 | 4 | 0 | |u https://appknovel.uam.elogim.com/kn/resources/kpSIHHMVE1/toc |z Texto completo |
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