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245 |
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|a Handbook of semiconductor silicon technology /
|c edited by William C. O'Mara, Robert B. Herring, Lee P. Hunt.
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260 |
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|a Park Ridge, N.J. :
|b Noyes Publications,
|c ©1990.
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300 |
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|a 1 online resource (xx, 795 pages) :
|b illustrations.
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|a online resource
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|a Materials science and process technology series
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520 |
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|a This book is an up-to-date summary of the science, technology and manufacturing of semiconductor silicon materials.
|
504 |
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|a Includes bibliographical references and index.
|
588 |
0 |
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|a Print version record.
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506 |
|
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|3 Use copy
|f Restrictions unspecified
|2 star
|5 MiAaHDL
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533 |
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|a Electronic reproduction.
|b [S.l.] :
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|d 2010.
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|a Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002.
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|a Silicon crystals
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|a Silicium cristallisé
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|a Silicon crystals.
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|a Handbooks and manuals.
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700 |
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|a O'Mara, William C.
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700 |
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|a Herring, Robert B.
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700 |
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|a Hunt, Lee P.
|q (Lee Philip)
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776 |
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8 |
|i Print version:
|t Handbook of semiconductor silicon technology.
|d Park Ridge, N.J. : Noyes Publications, ©1990
|z 0815512376
|w (DLC) 89077167
|w (OCoLC)20825221
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830 |
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|a Materials science and process technology series.
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