Cargando…
Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions /
An overview of the technology that describes the advantages provided by plasmas, plasma fundamentals, and a range of plasma processes relevant to the deposition and etching of thin films for microelectronics and other fields.
| Clasificación: | Libro Electrónico |
|---|---|
| Otros Autores: | , , |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Park Ridge, N.J. :
Noyes Publications,
©1990.
|
| Colección: | Materials science and process technology series.
|
| Temas: | |
| Acceso en línea: | Texto completo |