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Handbook of semiconductor wafer cleaning technology : science, technology, and applications /
Discusses semiconductor wafer cleaning and the scientific and technical disciplines associated directly or indirectly with this subject. Intended to serve as a handbook for practitioners and professionals in the field.
| Clasificación: | Libro Electrónico |
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| Otros Autores: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Park Ridge, N.J., U.S.A. :
Noyes Publications,
©1993.
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| Colección: | Materials science and process technology series. Electronic materials and process technology.
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| Temas: | |
| Acceso en línea: | Texto completo |
Tabla de Contenidos:
- 12. Ultratrace Impurity Analysis of Silicon Surfaces by SIMS and TXRF Methods / Richard S. Hockett
- 13. Future Directions / Werner Kern.