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Handbook of semiconductor wafer cleaning technology : science, technology, and applications /
Discusses semiconductor wafer cleaning and the scientific and technical disciplines associated directly or indirectly with this subject. Intended to serve as a handbook for practitioners and professionals in the field.
| Clasificación: | Libro Electrónico |
|---|---|
| Otros Autores: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Park Ridge, N.J., U.S.A. :
Noyes Publications,
©1993.
|
| Colección: | Materials science and process technology series. Electronic materials and process technology.
|
| Temas: | |
| Acceso en línea: | Texto completo |
MARC
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| 245 | 0 | 0 | |a Handbook of semiconductor wafer cleaning technology : |b science, technology, and applications / |c edited by Werner Kern. |
| 260 | |a Park Ridge, N.J., U.S.A. : |b Noyes Publications, |c ©1993. | ||
| 300 | |a 1 online resource (xx, 623 pages) : |b illustrations | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a online resource |b cr |2 rdacarrier | ||
| 490 | 1 | |a Materials science and process technology series. Electronic materials and process technology | |
| 520 | |a Discusses semiconductor wafer cleaning and the scientific and technical disciplines associated directly or indirectly with this subject. Intended to serve as a handbook for practitioners and professionals in the field. | ||
| 504 | |a Includes bibliographical references and index. | ||
| 588 | 0 | |a Print version record. | |
| 505 | 0 | |a 12. Ultratrace Impurity Analysis of Silicon Surfaces by SIMS and TXRF Methods / Richard S. Hockett -- 13. Future Directions / Werner Kern. | |
| 506 | |3 Use copy |f Restrictions unspecified |2 star |5 MiAaHDL | ||
| 533 | |a Electronic reproduction. |b [Place of publication not identified] : |c HathiTrust Digital Library, |d 2010. |5 MiAaHDL | ||
| 538 | |a Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. |u http://purl.oclc.org/DLF/benchrepro0212 |5 MiAaHDL | ||
| 583 | 1 | |a digitized |c 2010 |h HathiTrust Digital Library |l committed to preserve |2 pda |5 MiAaHDL | |
| 546 | |a English. | ||
| 590 | |a Knovel |b ACADEMIC - Electronics & Semiconductors | ||
| 650 | 0 | |a Semiconductor wafers |x Cleaning. | |
| 650 | 6 | |a Plaquettes à gravure en semi-conducteurs |x Nettoyage. | |
| 650 | 7 | |a Semiconductor wafers |x Cleaning |2 fast | |
| 650 | 7 | |a Semicondutores. |2 larpcal | |
| 700 | 1 | |a Kern, Werner, |d 1925- | |
| 776 | 0 | 8 | |i Print version: |t Handbook of semiconductor wafer cleaning technology. |d Park Ridge, N.J., U.S.A. : Noyes Publications, ©1993 |z 0815513313 |w (DLC) 93004078 |w (OCoLC)27976222 |
| 830 | 0 | |a Materials science and process technology series. |p Electronic materials and process technology. | |
| 856 | 4 | 0 | |u https://appknovel.uam.elogim.com/kn/resources/kpHSWCTSTB/toc |z Texto completo |
| 936 | |a BATCHLOAD | ||
| 938 | |a Internet Archive |b INAR |n handbookofsemico0000unse | ||
| 994 | |a 92 |b IZTAP | ||