An introduction to time-of-flight secondary ion mass spectrometry (ToF-SIMS) and its application to materials science /

This book highlights the application of Time-of-Flight Secondary Ion Mass Spectrometry (ToF-SIMS) for high-resolution surface analysis and characterization of materials. While providing a brief overview of the principles of SIMS, it also provides examples of how dual-beam ToF-SIMS is used to investi...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor principal: Fearn, Sarah (Autor)
Formato: Electrónico eBook
Idioma:Inglés
Publicado: San Rafael [California] (40 Oak Drive, San Rafael, CA, 94903, USA) : Morgan & Claypool Publishers, [2015]
Colección:IOP (Series). Release 2.
IOP concise physics.
Temas:
Secondary ion mass spectrometry.
Time-of-flight mass spectrometry.
Materials science.
Microscopy.
TECHNOLOGY & ENGINEERING / Measurement.
Acceso en línea:Texto completo
Tabla de Contenidos:
  • Preface
  • Author biography
  • 1. Introduction
  • 1.1. Overview
  • 1.2. Basic principles
  • 2. Practical requirements
  • 2.1. Ion generation
  • 2.2. Primary and sputter ion beam sources
  • 2.3. Mass analysis
  • 2.4. Ion detection
  • 2.5. Ultra high vacuum
  • 3. Modes of analysis
  • 3.1. High-resolution mass spectra
  • 3.2. Depth profiling
  • 4. Ion beam-target interactions
  • 4.1. Ion beam induced atomic mixing
  • 4.2. Beam induced surface roughening and uneven etching
  • 4.3. Beam induced segregation
  • 4.4. Other beam induced effects
  • 4.5. Depth profiling with cluster ion beams
  • 5. Application to materials science
  • 5.1. Biomaterials and tissue studies
  • 5.2. Glass corrosion
  • 5.3. Ceramic oxides
  • 5.4. Semiconductor analysis
  • 5.5. Organic electronics
  • 6. Summary.

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