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Introduction to focused ion beam nanometrology /
This book describes modern focused ion beam microscopes and techniques and how they can be used to aid materials metrology and as tools for the fabrication of devices that in turn are used in many other aspects of fundamental metrology. Beginning with a description of the currently available instrum...
| Clasificación: | Libro Electrónico |
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| Autor principal: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
San Rafael [California] (40 Oak Drive, San Rafael, CA, 94903, USA) :
Morgan & Claypool Publishers,
[2015]
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| Colección: | IOP concise physics.
IOP (Series). Release 2. |
| Temas: | |
| Acceso en línea: | Texto completo |
| Sumario: | This book describes modern focused ion beam microscopes and techniques and how they can be used to aid materials metrology and as tools for the fabrication of devices that in turn are used in many other aspects of fundamental metrology. Beginning with a description of the currently available instruments including the new addition to the field of plasma-based sources, it then gives an overview of ion solid interactions and how the different types of instrument can be applied. Chapters then describe how these machines can be applied to the field of materials science and device fabrication giving examples of recent and current activity in both these areas. |
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| Notas: | "Version: 20151001"--Title page verso. "A Morgan & Claypool publication as part of IOP Concise Physics"--Title page verso. |
| Descripción Física: | 1 online resource (various pagings) : illustrations (some color). Also available in print. |
| Público: | This book will appeal in the first instance to university academics post-doctoral researchers and post- graduate students or advanced undergraduates. Beyond this, many industries where materials properties are required and in particular, where material is limited, for example anyone that processes thin films and coatings. |
| Bibliografía: | Includes bibliographical references. |
| ISBN: | 9781681740843 9781681742120 |
| ISSN: | 2053-2571 |