Cargando…
Nanofabrication : nanolithography techniques and their applications /
A comprehensive edited volume on important and up-to-date nanolithography techniques and applications. The book includes an introduction on the importance of nanolithography in today's research and technology, providing examples of its applications. The remainder of the book is split into two s...
| Clasificación: | Libro Electrónico |
|---|---|
| Otros Autores: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Bristol [England] (Temple Circus, Temple Way, Bristol BS1 6HG, UK) :
IOP Publishing,
[2020]
|
| Colección: | IOP ebooks. 2020 collection.
|
| Temas: | |
| Acceso en línea: | Texto completo |
Tabla de Contenidos:
- 1. Introduction to nanolithography techniques and their applications / José María De Teresa
- 2. Optical lithography / Francesc Perez-Murano, José Ignacio Martín and José María De Teresa
- 3. Electron beam lithography and its use on 2D materials / Vito Clericò, Mario Amado and Enrique Diez
- 4. Focused electron beam induced deposition / Javier Pablo-Navarro, Soraya Sangiao, César Magén and José María De Teresa
- 5. Focused ion beam induced processing / Pablo Orús, Rosa Córdoba and José María De Teresa
- 6. Scanning probe lithography / Ricardo Garcia
- 7. Soft thermal nanoimprint and hybrid processes to produce complex structures / Isabel Rodríguez and Jaime Hernández
- 8. Stencil lithography / Oscar Vazquez-Mena and Luis Guillermo Villanueva
- 9. Ice lithography / Anpan Han, Ding Zhao and Min Qiu
- 10. Magnetic nanopatterning via thermal scanning probe lithography / Edoardo Albisetti, Daniela Petti, Riccardo Bertacco and Elisa Riedo
- 11. Nanofabrication of three-dimensional magnetic structures / Dédalo Sanz-Hernández, Claire Donnelly, Lucas Pérez and Amalio Fernández-Pacheco
- 12. FEBIP for functional nanolithography of 2D nanomaterials / Songkil Kim and Andrei G. Fedorov.