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ELB179453 |
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FINmELB |
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20200520144314.0 |
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m o d | |
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cr cn||||||||| |
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130422s2013 njua sb 001 0 eng d |
| 010 |
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|z 2013016209
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| 020 |
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|z 9781118062777 (cloth : alk. paper)
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| 020 |
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|a 9781118747421 (electronic bk.)
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| 035 |
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|a (OCoLC)972871537
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| 040 |
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|a FINmELB
|c FINmELB
|d FINmELB
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| 050 |
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4 |
|a TS695
|b .K33 2013
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| 082 |
0 |
4 |
|a 620/.5
|2 23
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| 100 |
1 |
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|a Kaariainen, Tommi.
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| 245 |
1 |
0 |
|a Atomic layer deposition
|h [electronic resource] :
|b principles, characteristics, and nanotechnology applications /
|c Tommi Kaariainen ... [et al.].
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| 250 |
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|a 2nd ed.
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| 260 |
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|a Hoboken, NJ :
|b John Wiley & Sons,
|c c2013.
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| 300 |
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|a xv, 253 p. :
|b ill.
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| 504 |
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|a Includes bibliographical references and index.
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| 588 |
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|a Description based on metadata supplied by the publisher and other sources.
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| 590 |
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|a Electronic reproduction. Santa Fe, Arg.: elibro, 2022. Available via World Wide Web. Access may be limited to eLibro affiliated libraries.
|
| 650 |
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0 |
|a Chemical vapor deposition.
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| 650 |
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0 |
|a Epitaxy.
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| 650 |
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0 |
|a Microelectronics.
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| 650 |
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0 |
|a Nanotechnology.
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| 655 |
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4 |
|a Electronic books.
|
| 797 |
2 |
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|a elibro, Corp.
|
| 856 |
4 |
0 |
|u https://elibro.uam.elogim.com/ereader/bidiuam/179453
|z Texto completo
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| 950 |
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|a eLibro English
|
